micropiv系统对方形微流道3d速度分布的测量（Measurement of 3D velocity distribution in square microchannel by MicroPIV system）.docVIP

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2017-09-05 发布于河南
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micropiv系统对方形微流道3d速度分布的测量（Measurement of 3D velocity distribution in square microchannel by MicroPIV system）.doc

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micropiv系统对方形微流道3d速度分布的测量（Measurement of 3D velocity distribution in square microchannel by MicroPIV system）

micropiv系统对方形微流道3d速度分布的测量（Measurement of 3D velocity distribution in square microchannel by MicroPIV system） The MicroPIV system of rectangular micro channel 3D velocity measurement Zheng Xu Wang Xuwei Li Zhanhua * Chinese Mechanical Institute of State Key Laboratory of nonlinear mechanics, Beijing, 100080 *lili@imech.ac.cn Abstract: This paper introduced a kind of vertical adjustment function to fine MicroPIV system. In conjunction with PI nano displacement controller, vertical displacement adjustment accuracy can reach 10nm. According to different vertical position of micro channel square 55 m * 20 m in the velocity measurement results, dimensionless velocity distribution measurement experiment and three-dimensional theoretical predictions are in good agreement, and the dimensionless maximum velocity in vertical direction is also consistent with the theoretical results. That 3 of the micro channel velocity profile 3D feature width depth ratio is less than. Keywords: MicroPIV, micro flow, flow velocity distribution of the square. 1. introduction Micro flow is an important content in the research of MEMS, has become an important basis for MEMS development in the field of research on micro flow mechanism, Ho Tai[1] have been comprehensively summarized. Santiago et al.[2] and Meinhart et al.[3] first developed MicroPIV technology, micro flow velocity measurements and flow visualization provides an important way. In recent years, MicroPIV technology has gradually become mature and has been successfully applied in the experimental measurement of micro flow in [4], [5], but there are still many problems need to be improved, such as improving spatial resolution, improve the measuring precision of the near wall region. This paper will be introduced by high magnification and high numerical aperture lens, MicroPIV system set up the nano displacement control system, the optical resolution of the system reaches 0.35 m, the image resolution of 80nm, the vertical position adjus