a method for evaluating the electro-mechanical characteristics of piezoelectric actuators during motion一个方法来评估压电致动器的机电特性在运动.pdfVIP

Sensors 2012, 12, 11559-11570; doi:10.3390/s120911559 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion Tao Jin *, Akihiro Takita , Mitra Djamal , Wenmei Hou , Hongzhi Jia and Yusaku Fujii Department of Electronic Engineering, Faculty of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan; E-Mails: takita@el.gunma-u.ac.jp (A.T.); fujii@el.gunma-u.ac.jp (Y.F.) Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia; E-Mail: mitra@fi.itb.ac.id Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; E-Mail: houwenmei@ (W.M.H.); jiahongzhi0715@ (H.Z.J.) * Author to whom correspondence should be addressed; E-Mail: gunma-u.ac.jp; Tel./Fax: +81-277-301-748. Received: 15 June 2012; in revised form: 8 August 2012 / Accepted: 14 August 2012 / Published: 24 August 2012 Abstract: The electro-mechanical characteristics of piezoelectric actuators which have being driven are evaluated in this paper. The force generated by actuators is measured as an inertial force of a corner cub prism which is attached to the actuators. The Doppler frequency shift of a laser beam, due to the motion of actuator, is accurately measured by a heterodyne interferometer. Subsequently, the