a miniature fiber optic refractive index sensor built in a mems-based microchannel微型光纤折射率传感器建成mems-based微通道.pdfVIP

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a miniature fiber optic refractive index sensor built in a mems-based microchannel微型光纤折射率传感器建成mems-based微通道.pdf

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a miniature fiber optic refractive index sensor built in a mems-based microchannel微型光纤折射率传感器建成mems-based微通道

Sensors 2011, 11, 1078-1087; doi:10.3390/s110101078 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel Ye Tian 1,*, Wenhui Wang 1, Nan Wu 1, Xiaotian Zou 2, Charles Guthy 1 and Xingwei Wang 1,2,* 1 Department of Electrical and Computer Engineering, University of Massachusetts Lowell, One University Ave., Lowell, MA 01854, USA; E-Mails: wwhclp02@ (W.W.); nan_wu@ (N.W.); Charles_Guthy@ (C.G.) 2 Biomedical Engineering and Biotechnology Doctoral Program, University of Massachusetts Lowell, One University Ave., Lowell, MA 01854, USA; E-Mail: xiaotian_zou@ (X.Z.) * Author to whom correspondence should be addressed; E-Mails: ye_tian@ (Y.T.); xingwei_wang@ (X.W.); Tel.: +1-978-934-3355; Fax: +1-978-934-3098. Received: 23 December 2010; in revisedform: 10 January 2011 / Accepted: 12 January 2011 / Published: 19 January 2011 Abstract: A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silicon chip. The mirrors on the fiber endfaces were made of thermal-deposited metal films, which provided the high finesse necessary to produce a highly sensitive sensor. Microelectromechanical systems (MEMS) fabrication techniques, specifically photolithography and deep