a polymer-based capacitive sensing array for normal and shear force measurement正常和剪切力的聚合物电容传感阵列测量.pdfVIP

Sensors 2010, 10, 10211-10225; doi:10.3390/s101110211 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement Ming-Yuan Cheng, Chun-Liang Lin, Yu-Tse Lai and Yao-Joe Yang * Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan; E-Mails: .tw (M.-Y.C.); gene0921719425@ (C.-L.L.); neptune@.tw (Y.-T.L.) * Author to whom correspondence should be addressed : E-Mail: yjy@.tw; Tel.: + 886-2-3366-2712; Fax: +886-2-2363-1755. Received: 18 October 2010; in revised from: 5 November 2010 / Accepted: 8 November 2010 / Published: 15 November 2010 Abstract: In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB) technologies. The sensing array consists of a polydimethlysiloxane (PDMS) structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 ×2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes