原创力文档analysis of deflection enhancement using epsilon assembly microcantilevers based sensors分析偏转增强使用基于ε组装微悬臂的传感器.pdfVIP
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analysis of deflection enhancement using epsilon assembly microcantilevers based sensors分析偏转增强使用基于ε组装微悬臂的传感器
Sensors 2011, 11, 9260-9274; doi:10.3390/s111009260
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Analysis of Deflection Enhancement Using Epsilon Assembly
Microcantilevers Based Sensors
Abdul-Rahim A. Khaled 1 and
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