an integrated mems gyroscope array with higher accuracy output一个集成mems陀螺仪精度较高的数组输出.pdfVIP

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an integrated mems gyroscope array with higher accuracy output一个集成mems陀螺仪精度较高的数组输出.pdf

an integrated mems gyroscope array with higher accuracy output一个集成mems陀螺仪精度较高的数组输出

Sensors 2008, 8, 2886-2899 sensors ISSN 1424-8220 © 2008 by MDPI /sensors Full Research Paper An Integrated MEMS Gyroscope Array with Higher Accuracy Output Honglong Chang *, Liang Xue, Wei Qin, Guangmin Yuan an

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