design, fabrication, and testing of a bulk micromachined inertial measurement unit大部分的设计、制造和测试微型机械惯性测量单元.pdfVIP

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design, fabrication, and testing of a bulk micromachined inertial measurement unit大部分的设计、制造和测试微型机械惯性测量单元.pdf

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design, fabrication, and testing of a bulk micromachined inertial measurement unit大部分的设计、制造和测试微型机械惯性测量单元

Sensors 2010, 10, 3835-3856; doi:10.3390/s100403835 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit Honglong Chang *, Qiang Shen, Zh

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