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design, fabrication and levitation experiments of a micromachined electrostatically suspended six-axis accelerometer微型机械的设计、制造和悬浮实验静电悬浮加速度计基础上.pdfVIP

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design, fabrication and levitation experiments of a micromachined electrostatically suspended six-axis accelerometer微型机械的设计、制造和悬浮实验静电悬浮加速度计基础上.pdf

    design, fabrication and levitation experiments of a micromachined electrostatically suspended six-axis accelerometer微型机械的设计、制造和悬浮实验静电悬浮加速度计基础上

    Sensors 2011, 11, 11206-11234; doi:10.3390/s111211206 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Acceleromet

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