原创力文档effect of the detector width and gas pressure on the frequency response of a micromachined thermal accelerometer影响探测器宽度和气体压力的频率响应的微型机械热加速计.pdfVIP
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effect of the detector width and gas pressure on the frequency response of a micromachined thermal accelerometer影响探测器宽度和气体压力的频率响应的微型机械热加速计
Micromachines 2011, 2, 167-178; doi:10.3390/mi2020167
OPEN ACCESS
micromachines
ISSN 2072-666X
/journal/micromachines
Article
Effect of the Detector Width and Gas Pressure on the Frequency
Response of a Micromachined Thermal Accelerometer
Alexandra Garraud, Phili
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