一种带力传感的微夹持器设计及试验-机器人.PDF

31 1 ROBOT Vol.31, No.1 2009 1 Jan., 2009 1002-0446(2009)-01-0067-05 210016 TP241.3 B Design and Experimentation of a Micro-gripper with Force Sensing HAN Jiang-yi YOU You-peng WANG Hua-ming ZHU Jian-ying (Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China) Abstract: A micro-gripper with force sensing is designed, and clamping motion is realized through piezoelectric ceramic stack actuation and flexible-hinge enlargement. Wheatstone bridge consisting of semiconductor strain-gauge stuck on the strain cantilever is used to measure the micro-clamping force. The structure of the flexible-hinge is optimized, and simulation analysis on the strain cantilever is carried out. Finally, the micro-gripper is fabricated and assembled, and calibration ex- periment of force sensing and micro-gripper operation experiment are carried out. Results from fabrication and experiments testify the feasibility and practicability of the presented micro-gripper with clamping force sensing. Keywords: micromanipulation; flexible-hinge; force sensing 8 1 Introduction Nelson AFM atomic AFM force microscope PVDF N 1 Peiner 2 Kim PVDF 3 Shen PVDF