MEMS失效机理和可靠性测试方法.pdf

The study of MEMS failure mechanisms and Reliability / Qualification testing methods th ESTEC October 2005,5th ESTEC October 2005,5 Sophie Barthe Gilbert Cros (EADS Astrium), Laurent Lopez (CNES), Sophie Barthe Gilbert Cros (EADS Astrium), Laurent Lopez (CNES), Stéphane Dussy Laurent Marchand (ESA) Stéphane Dussy Laurent Marchand (ESA) Content • Overall project overview • Presentation of the ESA/CNES Physical Analysis • Presentation of the test plan • Presentation of the test results • Presentation of CNES FailureAnalysis • Conclusion of the activity 1. Aim of the study To understand the issue related to MEMS Assess MEMS based Gyro Reliability Define the tight experiments and testing MEMS ( MicroElectroMechanicalSystems ) : 10µm size intelligent systems Miniaturisation of platform electronics by the use of MEMS Interest for CNES, ESA and ASTRIUM MEMS overview : applications in space, MEMS technology, failure mechanisms, MEMS reliability test methods. Elaborate testing of MEMS : the micro-gyroscope Guideline redaction for the evaluation of MEMS MEMS: Interest for space Launch cost Mass production methods Weight reduction Low power consumption Satellite miniaturisation Easy manipulation Which micro-devices in a satellite?