sm-fe系薄膜悬臂板磁致伸缩行为的有限元模拟-中国有色金属学报.pdf

19 10 2009 10 Vol.19 No.10 The Chinese Journal of Nonferrous Metals Oct. 2009 1004-0609(2009)10-1880-06 Sm-Fe ( 350108) (IBSD)Sm-Fe ANSYS / Sm-Fe Sm-Fe/Fe Sm-Fe Sm-Fe/Fe Fe Sm-Fe Sm-Fe Sm-Fe TM 27; TB 43 A Finite element modeling of magnetostrictive behavior for Sm-Fe system film cantilever ZHOU Bai-yang, CHEN Zi-rong, LUO Han-bin, MAO Hong-ying, LI Ren (College of Materials Science and Engineering, Fuzhou University, Fuzhou 350108, China) Abstract: Sm-Fe system giant magnetostrictive films were prepared by ion beam sputtering. The bending property of the giant magnetostrictive film/glass substrate cantilever was studied by finite element modeling. The internal magnetic states of the giant magnetostrictive films were simulated. The finite element analysis results show that the deflection is in direct proportion to the film thickness and quadratic parabola to the substrate thickness when the film thickness is much less than the substrate thickness. The analysis results are well comparable to the experiment ones. The internal magnetic field of Sm-Fe single film is uniform. Inside the Sm-Fe/Fe composite film, because of the negative magnetic effect of Fe film, the internal magnetic field of Sm-Fe film becomes nonuniform, and the magnetic induction is less than that of the Sm-Fe single film. Key words: Sm-Fe film; ion beam sputtering; finite element; magnetostrictive (MEMS)20 [1−4] 80 21 (Giant () magnetostrictive thin filmsGMF)