扫描电镜与投射电镜（Scanning electron microscope and projection electron microscope）.docVIP

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扫描电镜与投射电镜（Scanning electron microscope and projection electron microscope）.doc

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扫描电镜与投射电镜（Scanning electron microscope and projection electron microscope）

扫描电镜与投射电镜（Scanning electron microscope and projection electron microscope） 1] detector X - ray spectrometer WDS The principle of construction is basically the same as that of X - ray fluorescence spectrometer. It uses electrons instead of X - ray as excitation source. X ray spectrometer is characterized by high resolution, usually 5 - 10eV, and can work at room temperature, so the accuracy of the analysis is high, and the detection limit is low. In addition, according to the Bragg theorem 2dsin theta = lambda, the light splitting elements such as boron, carbon, nitrogen and oxygen can be analyzed by using D crystal with X crystal spacing. But the X ray spectrometer has its limitations, it is the crystal of light receiving solid angle X ray is small, low utilization rate of X ray; in addition, sample requirements like metallographic specimen as the surface smooth smooth, not rough sample analysis. Lithium drift silicon detector principle EDS When the photon enters the detector, a certain number of electron hole pairs are excited in the Si (Li) crystal. Have a hole on the minimum average energy epsilon is certain, therefore caused by a X ray photon cavity on the number of N= E/. The higher the energy of the incident X - ray photon, the greater the N. The electron hole pairs are collected by biasing the electrodes at both ends of the crystal, and the current pulses are converted by a preamplifier to the height of the current pulse, depending on the size of the N. After the main amplifier to convert the voltage pulse into the multichannel pulse height analyzer pulse current, pulse height analyzer according to the height of the pulse classification count, so that you can draw a X ray energy according to size distribution map. EDS spectrometer, analysis, characteristics: The efficiency of spectrometer in detecting X ray is high. At the same time, the energy of X ray photons of all elements in the analysis point is measured and counted, and qualitative analysis results can