超高真空多功能磁控溅射镀膜设备（Ultra high vacuum multifunctional magnetron sputtering coating equipment）.docVIP

超高真空多功能磁控溅射镀膜设备（Ultra high vacuum multifunctional magnetron sputtering coating equipment） Ultra high vacuum multifunctional magnetron sputtering coating equipment First boot Cooling water is connected to the molecular pump and each magnetic control target. Check that the waterway is leaking. The power supply of each unit is connected with the main power supply, and the main power supply is supplied. Gate plate G1 and G2, start mechanical pump I and II, open solenoid valve, pre pumping sputtering chamber, sampling room. According to coating needs, in turn opened the cut-off valve V1 (gas mixing