微波等离子体炬反应区的冷模测量与仿真.PDFVIP

See discussions, stats, and author profiles for this publication at: /publication/280216675 Cold-model Experimental and Simulation Research of Reaction Zone of a Microwave Plasma Torch Article in aodianya Jishu/High Voltage Engineering · January 2014 DOI: 10.13336/j.1003-6520.hve.2014.01.039 CITATIONS READS 0 32 6 authors, including: Boya Zhang uixin Zhang University of Connecticut Tsinghua University 18 PUBLICATIONS 26 CITATIONS 178 PUBLICATIONS 1, 15 CITATIONS SEE PROFILE SEE PROFILE Some of the authors of this publication are also working on these related projects: National Natural Science Foundation of China View project All content following this page was uploaded by Boya Zhang on 21 July 2015. The user has requested enhancement of the downloaded file. 第 40 卷 第 1 期：262-268 高电压技术 Vol.40, No.1: 262-268 2014 年 1 月 31 日 High Voltage Engineering January 31, 2014 DOI: 10.13336/j.1003-6520.hve.2014.01.039 1 1 1 1 2 1 1. 100084 2.14850 ：为了分析波导反应腔调谐参数以及微波源频率对等离子体反应区电场强度的影响，对2.45 GHz 微波等离 子体炬(MPT)的反应区进行了冷模测量实验，与专业高频电磁仿真软件(CST) 电磁仿真进行对比，并通过热测实验 验证。研究结果表明：冷模实验与仿真得到的各参数对反应区电场强度的影响规律相符，调谐最优值存在一定的 偏差；该装置的能量辐射主要以磁耦合为主；在调谐圆柱总高度为 45.21~50.04 mm 时，反应区的电场强度较大； 远离辐射孔时，微波能量迅速衰减。采用冷模实验得到的最优调谐参数，该波导装置在 0.