基于多项式曲面拟合的TFT-LCD斑痕缺陷自动检测技术-张昱.pdfVIP

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基于多项式曲面拟合的TFT-LCD斑痕缺陷自动检测技术-张昱.pdf

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33 10 Vol.33, No.10 2006 10 Opto-Electronic Engineering Oct, 2006 1003501X(2006 TFT-LCD ( 150001 ) TFT-LCD TP182 A Automatic blemish inspection for TFT-LCD based on polynomial surface fitting ZHANG YuZHANG Jian ( Institute of Ultra Precision Optical Electronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China ) AbstractAmong various visual defects of LCD, “blemish” detection is the most complex problem that has not been solved effectively. A new blemish inspection method for TFT-LCD is proposed. In image segmentation, a background modeling method based on polynomial surface fitting using least square method is presented. Utilizing this background model, candidate area of blemish could be segmented from the panel image by background subtraction. In feature extraction, a new “blemish” model is proposed, which takes several features into account, such as the contrast, area, location, outline, shape and the luminance uniformity of the object. In pattern recognition, a fuzzy classifier is designed. This method could well employ the experiences and knowledge of operators. Therefore, good detection result is obtainedwhich is consiste