SEM 和EPMA 更深入的课题.ppt

SEM and EPMA Some Advanced Topics Beyond the Basics Stereo SEM Example: porous sandstone Stereo SEM Details EDS of particles Particles - 1 Mass effect/error: electrons escape from sides of small particles if E0 is large enough, so quantitative analysis will be in error because different elements (with different binding energies) will be affected differently Particles - 2 Absorption effect of non-flat upper surface: different path length from normal flat geometry and the “normal” way we do quantitative analysis is to use FLAT polished standards for calibration -- so we could have “too much” x-ray intensity for particles Particles - 3 Variable effect of geometry of trajectory between beam impact area on non-uniform surface and the location of the detector -- so we get different results from the same material, depending upon where we place the electron beam. EDS X-ray Mapping-1 EDS X-ray Mapping-2 EDS X-ray Mapping-3 X-ray Mapping and the clock Due to the low count rate of detected X-rays, dwell times in the past generally needed to be hundreds of milli-seconds. A 512x512 X-ray map at 100 msecs took ~8 hours to acquire. The improvements to EDS systems with improved digital processing throughput allows 1-10 msec dwell times, dropping the x-ray mapping times down to the hour or less range, in many cases Continuum Artifact However… “X-ray mapping” of predefined elements is now pretty much a thing of the past (or of EDS systems purchased before 2000 or so). Data Cube With the large increases in computing power, memory, and storage, it is now possible to acquire a complete spectrum at each pixel -- within the time frame of the acquisition time.Therefore it is possible to subtract the background find elements that were not known to be present beforehand Spectral (“hyperspectral”) Imaging One of the issues with SEMs… Multivariate statistical analysis Multivariate statistical analysis Needle in a haystack X-ray Mapping Feature Sizing, Chemical Typing 1. Set the BSE