Summit_SS探针的台.pdf

Summit 200 mm Semi-automatic Probe System DATA SHEET Summit™ series semi-automatic probe systems, with PureLine™ and AttoGuard® technology, allow you to access the full range of your test instruments for 200 mm and 150 mm wafers. Whatever your application: RF/Microwave, device characterization, wafer level reliability, e-test, modeling, or yield enhancement, Summit series platforms lead the industry in on-wafer measurements. Summit series probe stations are easy to configure with your choice of measurement performance, chuck size, thermal range and microscope options. All platforms are -60°C to 300°C compatible to ensure an upgrade path to meet your future needs. Cascade Microtech provides many accessories for the Summit platform for a wide range of applications to suit your unique test needs. FEATURES / BEnEFiTS Measurement accuracy Best solution for low-noise and 1/f measurements with advanced PureLine, AutoGuard and MicroChamber® technologies Minimize AC and spectral noise with effective shielding capability Positioning accuracy Precision linear-motor for accurate positioning with temperature compensation and automated XYZ and theta correction for enhanced positioning accuracy Productivity Unattended testing over multiple temperatures with VueTrack™ technology and High-Temperature Stability (HTS) enhancement eVue™ digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation Powerful automation tools, such as automatic die-size measurements and wafer alignment Flexibility and RF/microwave device characterization, 1/f, WLR, FA and design debug application-tailored