CRYOPUMP 冷凝泵基础.pptVIP

CTI CRYOPUMPING SEMINAR CTI-CRYOGENICS Cryopumping Basics Compressor Basics CRYOPUMPING BASICS:Molecules and Temperature CRYOPUMPING BASICS:Molecules and Temperature CRYOPUMPING BASICS:Capture Theory CRYOPUMPING BASICS:Capture Theory CRYOPUMPING BASICS:Capture Theory CRYOPUMPING BASICS:Capture Theory - Cryoadsorption Increased surface area provides greater capacity. Released molecules remain confined. Irregular surface constricts motion. Cryoadsorption of hydrogen, neon, and helium accomplished. Large surface area: 1150-1250 m2/gm CRYOPUMPING BASICS:Cryopump Concept Cryo