三维力柔性触觉传感器电极研究与实验_黄英.pdf

27 1 Vol. 27 No. 1 2013 1 JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT 57 DOI: 10.3724/SP.J.1187.2013.00057 * 1, 2 1 1 1 1 2 (1. 230009; 2. 230031) : , //, 2 .2 , 2 , , , 2 , , : ; ; ; : TP212;TN9 : A : 460.4020 Research and experiment of electrodes for 3D force flexible tactile sensor Huang Ying1, 2 Miao Wei1 Li Leiming 1 Cai Wenting1 Yang Qinghua1 Ge Yunjian2 (1. School of Electronic Science Applied Physics, Hefei University of Technology, Hefei 230009, China; 2. Institute of Intelligence Machines, Chinese Academy of Sciences, Hefei 230031, China) Abstract: In order to realize 3D force detection of intelligent robot skin, and based on surface piezoresistive effect of car- bon black/carbon nanotubes/silicone rubber, two 3D force flexible tactile sensors with different arrangement and four in- terdigitated electrodes with symmetrical structure are designed in this paper. The working principle of two 3D force tactile sensors is theoretically analyzed, and the experiment results of measurement range, sensitivity and linearity of these two structure sensors have been compared. The experimental results show that the sensor with four electrodes squared ar- rangement has a higher sensitivity and better linearity in shear force direction, but the measurement range is smaller than that of the sensor with four electrodes cross-shaped arrangement. The 3D force experimental results show that these two kinds of new 3D force flexible tactile sensors have the function of 3D force detection. I