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Precision Engineering 24 (2000) 160–173 Robust friction compensation for submicrometer positioning and tracking for a ball-screw-driven slide system Paul I. Roa, a b *, Wonbo Shim , Sanghwa Jeong aPrecision Engineering Center, Department of Mechanical and Aerospace Engineering, North Carolina State University, 3182 Broughton Hall, Box 7910, Raleigh, NC 27695-7910, USA bDepartment of Mechanical Engineering, Chosun University, Kwangjoo, Korea Received 3 February 1999; received in revised form 21 September 1999; accepted 9 December 1999 Abstract Ball-screw-driven slide systems are largely used in industry for motion control applications. Their performance using standard proportional-integral-derivative (PID) control algorithm is unsatisfactory in submicrometer motion control because of nonlinear friction effects. In this article, controllers based on a bristle-type nonlinear contact model are developed and implemented for submicrometer motion. For submicrometer positioning, a proportional-derivative (PD) control scheme with a nonlinear friction estimate algorithm is developed, and its performance is compared with that of a PID controller. For tracking, a disturbance observer was added to reject external disturbances and to improve robustness. The experimental results indicate that the proposed controller has consistent performance in positioning with under 1.5% of steady-state error in the submicrometer range. For tracking performance, the proposed controller shows good and robust tracking with respect to parameter variation. © 2000 Elsevier Science Inc