德国Centrotherm石墨舟组装.pptVIP

Process technology training Contents Centrotherm graphite boat Boat cycle Disassembly Cleaning Drying Assembly Pre-coating Process Summary Centrotherm graphite boat Centrotherm graphite boat The boat and the wafers act as a capacitor Tolerances in geometry and loading of the wafers have a direct impact on the process result The boat is made of highly conductive graphite Minimal construction tolerance Boat cycle Disassembly 1 Requirements: Even table Wrench for opening the nuts Soft and even support for the plates Heat and acid resistant carrier for loading boat parts into cleaner Disassembly 2 Cleaning SiN etching process, e.g. in Lotus Spraycleaner Stangl HF bath Recipe: ~4h etching in 10-20% HF ~6h rinsing in DI water (multiple steps) Check for HF residue after cleaning process with indicator paper Advice: Clean graphite and ceramics separately if using a bath. Do not clean ceramics longer than needed (ceramic slowly dissolves in HF) Drying At least 8h hot air drying time at 80°C Temperature should not exceed 90 °C White stains on graphite blocks is an indication of insufficient rinsing Insufficient drying can lead to boat damage and tube contamination Assembly Steps Wipe plates free of graphite dust Assemble boat on Maintenance Trolley! Check pins for abrasion and correct placement Check for damaged parts and replace them if necessary Fasten one nut at a time with 0,6 nm torque wrench. Lock each nut with a second nut Pin alignment Correct pin position and wafer loading. Precoating The boats needs a pre-coating before the first process run after cleaning Without pre-coating wafer uniformity will be bad Always use dummy wafers for pre-coating, do not pre-coat an empty boat The pre-coating process is an extended SiN coating equivalent to at least 10 process runs (deposition time 120 minutes) After pre-coating a SiN layer can be seen on the boat. Process The boat will be covered with more SiN in each run 150 process runs should not be exceeded Uniformity from wa