制备磁性薄膜的两种磁性浆料的合成方法对比acomparisonstudyof.pdf

Vol. 4 No./ Feb. 010 制备磁性薄膜的两种磁性浆料的 合成方法对比 A Comparison Study of Two Different Methods to Synthesize Magnetic Slurry for the Fabrication of Magnetic Films 郑旭　孙蓉　于淑会　李磊　杜如虚　万里兮 摘 要 本文设计了一种新型螺旋型薄膜电感结构，在这种结构中，绝缘电感薄膜取代了传统设计中同时采用绝缘层和磁 性层的方式。分别采用化学共沉淀法和微乳液法制备磁性浆料，浆料由有机聚合物和纳米Fe O 复合而成。利用共沉淀法 3 4 制备的磁性浆料，FeO粒径为20 nm, 以团聚的形式束缚在硅胶中。相反，以微乳液法制备的水溶性6~15 nm FeO分散 3 4 3 4 3 3 良好。共沉淀法和微乳液法制备的磁性浆料的磁导率分别为110 cm/mol 和344 cm/mol。用微乳液法制备的薄膜表面光 滑。相反，以共沉淀法制备的薄膜有很多裂纹。因此，微乳液法更适合用于合成磁性浆料以制备磁性薄膜。 关键词 薄膜；电感；共沉淀法；微乳液法 ABSTRACT A new spiral thin-film inductor structure is designed, in which the insulating magnetic thin film takes the places of both the insulating layer and the magnetic layer in the traditional structure. For the fabrication of the insulating magnetic film, a magnetic slurry which is a soft magnetic composite composed of organic polymer and nano Fe O particles was synthesized. The magnetic slurry was synthesized by chemical co-precipitation method and  4 microemulsions, respectively. Fe O particles with a grain size of 0nm tends to agglomerate and is constrained by the  4 network of silicon gel in the first slurry prepared via co-precipitation. While in the microemulsions, water-soluble organic material disperses the nanoFe O whose size lays in the range of -1nm. The two kinds of magnetic slurries have  4