第九屆全國計算流體力學學術研討會論文格式.docVIP

軟性基材表面ZnO薄膜之機械性質 莊晉東*, 張瑞慶2, 葉甄佩3, 林鈞偉3 1聖約翰科技大學機械與電腦輔助工程系助理教授 2聖約翰科技大學機械與電腦輔助工程系教授 3聖約翰科技大學自動化及機電整合研究所研究生 摘 要 奈米壓痕法探討薄膜機械性質，分析其楊氏係數與硬度關係。本文旨在探討利用射頻磁控濺鍍法將聚對苯二甲酸乙二醇酯(Polyethylene Terephthalate, PET）軟性基材表面濺鍍一層氧化鋅（inc oxide, ZnO）薄膜之薄膜機械性質。將濺鍍後的試片實驗結果顯示壓痕深度不超過膜厚的20%，數據為最可靠。數據PET基材的楊氏係數會隨著施加荷重的增加而增加，硬度值會隨著施加荷重的增加而減少；ZnO的楊氏係數硬度值會隨荷重增加而減少 關鍵字：氧化、、薄膜、奈米壓痕 echanical Properties of Zinc Oxide Deposition Thin Films on PET Substrate Chin-Tun Chuang 1*, Rwei-Ching Chang 2, Chen-Pei Yeh 3, Chun-Wei Lin 3 1Department of Mechanical and Computer-Aided Engineering, St. Johns University 2Department of Mechanical and Computer-Aided Engineering, St. Johns University 3 Institute of Automation and Mechatronics, St. John’s University Abstract Nanoindentation provides a depth-sensing indentation test that has been successfully utilized to evaluate the mechanical properties such as the hardness and elastic modulus of thin films. In this research, a 200 nm thickness ZnO thin film was deposited on a 188μm thickness PET Substrates by a RF magnetron sputter. The mechanical properties of the substrates and zinc oxide thin films were measured. The results show that the elastic modulus of the PET Substrates increases as the indentation load increases and the hardness of the PET substrates decreases as the indentation load increases. But the elastic modulus and hardness of ZnO thin films on PET substrates decreases as the indentation load increases. According to the experimental result, the measure data were the most reliable when the indentation depth was less than 20% of the film thickness. Keywords：Zinc Oxide, olyethylene Terephtalate Substrate, Thin Film, Nano-indent. 前言 氧化鋅為一用途相當廣泛的N型Ⅱ-Ⅵ族半導體材料，又名白鋅，為兩性氧化物，熔點為1975℃，室溫下為白色粉末氧化鋅原料充足，單價較低，不具毒性，在高溫環境時穩定度較高表1為氧化鋅材料的基本特性。在常溫下的光學能隙(Optical Band Gap)寬度約3.37eV，為直接能隙半導體，且其自由激子束縛能(excitonic binding energy)在室溫下約60eV，適合作為發光效率良好的二極體發光元件；氧化鋅薄膜的應用面很廣，如半導體材料semi- conductor material)，感測器元件Transducer device)，壓電材料piezo-electric material)、表面聲波元件(surface acoustic wa