微电子机械系统技术基础RFMEMS.pptVIP

2011 MEMS Center , Chen Weiping Coil Inductors ? Electroplated copper ? 50x5mm2 traces ? 10W-cm Silicon substrate ? Coil: – Increased L, Q – Reduced substrate loss – Increased self-resonance – Reduced area Ref: D. Young et al, IEDM 1997 2011 MEMS Center , Chen Weiping Inductor Fabrication Passivation oxide Seed mask 5mm electroplated Cu for bottom traces (50mm trace width) 2008 MEMS Center , Chen Weiping Fabrication (cont.) Alumina core Electroplated photoresist Laser lithography Electroplated Cu 2011 MEMS Center , Chen Weiping Inductor Performance Turns Q(1GHz) L fself 1 30 5nH 10GHz 4 16 14nH 5GHz ? low substrate losses ? loss limited by bottom “contact” (higher Q possible?) 2011 MEMS Center , Chen Weiping Voltage-Controlled Oscillator ? VCO (136dBc, Df=3MHz) ? Meets GSM noise specs ? MOS Colpitt’s oscillator 2011 MEMS Center , Chen Weiping Results ? atmospheric pressure (low Qmech) ? mechanical noise dominates close to carrier ? not significant problem in most applications 2011 MEMS Center , Chen Weiping Resonator BPF, Bandpass Filter 2-port lateral microresonator 3rd order BPF 2011 MEMS Center , Chen Weiping Third order Bandpass Filter Company Logo Micromechanical Filters 2014 MEMS Center , Chen Weiping MEMS Center , Chen Weiping MEMS Center , Chen Weiping 2013 MEMS Center , Chen Weiping RF-MEMS Chen Weiping (chenwp@) MEMS Devices - 3 2014 MEMS Center , Chen Weiping Outline Tunable Capacitors Switches Filters 3-Dimensional Inductors Application: Voltage-Controlled Oscillator (VCO) 2014 MEMS Center , Chen Weiping 2013 MEMS Center , Chen Weiping 2013 MEMS Center , Chen Weiping RF MEMS Switches 2011 MEMS Center , Chen Weiping Current Technology Electromechanical devices Waveguide, coaxial switches low insertion loss, high isolation, good power handling Slow, high power consumption, unreliable for long-life applications Solid-state RF technologies PIN diode- and FET- based high switchi