等离子体浸没离子注入-CityUniversityofHongKong.PDF

第 25 卷 　第 2 期 真 　空 　科 　学 　与 　技 　术 　学 　报 　　　　　　 ( ) 　　　　　　　　　　 2005 年 3 、4 月 JOURNAL OF VACUUM SCIENCE AND TECHNOLO GY CHINA 115 　 ( ) 等离子体浸没离子注入 PIII 过程中初始离子阵 鞘层尺度内各物理量的时空演化 1 1 1 1 2 2 黄永宪 　田修波 　杨士勤 　黄志俊 　Ricky Fu 　Paul K. Chu ( 1. 哈尔滨工业大学现代焊接生产技术国家重点实验室 　黑龙江哈尔滨 　150001 ; 2. 香港城市大学物理及材料科学系 　香港九龙) Temporal Evolution in an Ionmatrix Sheath During Plasma Immersion Ion Implantation 1 1 1 1 2 2 Huang Yongxian , Tian Xiubo , Yang Shiqin ,Huang Zhijun ,Ricky Fu and Paul K. Chu ( 1. A dvanced Welding Production Technology N ational Key L aboratory , Harbin Institute of Technology , Harbin 150001, China ; ) 2. Depart ment of Physics and M aterials Science , City U niversity of Hong Kong , Kow loon , China 　　Abstract 　Plasma immersion ion implantation ( PIII) has proven to be a low cost and high efficient surface modification technique to treat complex shaped objects. The tar get is immersed in a plasma ,and the ions ,extracted from the plasma directly ,are accelecrated and then implanted into the surface by applied negative highvoltage pulses to the target. In order to describe the implantation dynam ics ,the plasma sheath has been studied by the particleincell ( PIC) simulation