第章电能谱仪构造电子能谱仪构造.PDF

4 1. 2. ((UHV)) 3. 44. 5. 66. 7. 4.14.1   (Instrumentation)(Instrumentation) 4.24.2(UHV)(UHV)  510-10 mbar10-8 ~ 10-10 mbar  ESCALAB 250 110-10 mbar  MuNi77Fe16Cu5Cr2Mo2 4.2.14.2.1   10-6mbar1  00.1%1% (UHV)  p = 10-8 – 10-11 torr. = ~104 – 107 m. t = ~102 – 105 s WhyWhy UHVUHV forfor SurfaceSurface Analysis?Analysis? TorrTorr  RemoveRemove adsorbed gases fromadsorbed gases from 101010102222 the sample.the sample.