Surface Roughness Measurement Using Dichromatic Speckle…使用二色散斑测量表面粗糙度.pdfVIP

Wilfrid Laurier University Scholars Commons @ Laurier Physics and Computer Science Faculty Publications Physics and Computer Science 9-1978 Surface Roughness Measurement Using Dichromatic S eckle Pattern: An Ex erimental Study Hitoshi Fujii Virg inia Poly technic Institute and State University J ohn WY. . Lit Wilfrid Laurier University, jlit@wlu.ca Follow this and additional works at : http://scholars.wlu.ca/phys_faculty Recommended Citation Fujii, Hitoshi and Lit, John W.Y., Surface Roughness Measurement Using Dichromatic Speckle Pattern: An Experimental Study (1978). Phy sics and Compu ter Science Faculty P ublications. Paper 21. http://scholars.wlu.ca/phys_faculty/21 This Article is brought to you for free and open access by the Physics and Computer Science at Scholars Commons @ Laurier. It has been accepted for inclusion in Physics and Computer Science Faculty Publications by an authorized administrator of Scholars Commons @ Laurier. For more information, please contact scholarscommons@wlu.ca. Surface roughness measurement using dichromatic speckle pattern: an experimental study Hitoshi Fuji! and John W. Y. Lit Surface roughness is studied experimentally by making use of the statistical properties of dichromatic speck- le patterns. The rms intensity difference between two speckle patterns produced by two argon laser lines are analyzed in the far field as functions of the object surface roughness and the difference in the two wave- numbers of the illuminating light. By applying previously derived formulas, the rms surface roughness is obtained from rms intensity differences. Glass and metal rough surfaces are used. Other than the scatter-