非硅工艺-微细特种加工.pdfVIP

Micro Manufacturing Based on Electro Machining 丁玉成 2010-10-11 Outline Introduction Fabrication of Micro Electrode Micro Removal Machining Micro Depositing Machining Conclusions Prospect 2010-10-11 Introduction One of Modern Manufacturing Aims: Micro Fine Method: Micro Machining Micro Electrical Machining (Micro-EDM and Micro-ECM): Very Good, Important and Special Method n capability of 3D machining n wide range of machinable materials