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改善铝箔蚀孔密度与均匀性之电源波形设计.PDF
NSC93
2
NSC93-2216-R-002-020
recorded, in which the breakdown potential was
measured. A scanning electron microscope
was employed for characterizing the surface
morphology and cross section of the foil,
(GVP) including the average depth and linear density
of the pits. Cross-sectional transmission
(SEM) electron microscope specimens were prepared
from the as-etched foil to reveal the detailed pit
(TEM) morphology and etch film structure. Finally,
X-ray photoelectron spectra of the surface film
(XPS) on the as-etched foil were measured using
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