基于弛豫铁电单晶的红外热释电探测器研究马学亮邵秀梅于月.doc

基于弛豫铁电单晶的红外热释电探测器研究 马学亮123,邵秀梅12,于月华12,李言谨12 (1.中国科学院上海技术物理研究所传感技术国家重点实验室,上海200083 2.中国科学院红外成像材料与器件重点实验室,上海200083 3.中国科学院研究生院,北京100039) 摘要：热释电非制冷红外探测器在工业、民用探测领域具有广泛的应用。弛豫铁电单晶（1-x）b(Mg1/3Nb2/3)O3- xPbTiO3（PMNT）具有优异的热释电综合性能μm晶片材料性能的测试分析表明，部分热释电系数约为9.0×10-4 C/m2 K，无明显衰减。采用低噪声电路提取单元探测器的微弱热释电电流，对所研制的单元探测器性能进行了测试、分析并指出了下一步研究的重点。 关键词：红外、热释电探测器、弛豫铁电单晶Ma Xueliang123, Shao Xiumei12, Yu Yuehua12, Li Yanjin12 （1.State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083 2. Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083 3.Graduate School of the Chinese Academy of Science, Beijing 100039） Abstract: Pyroelectric infrared detectors have the advantage of working at room temperature. They are widely used in industrial and civilian field. PMNT single crystal is a novel pyroelectric material with superior pyroelectric performances. The key process of the fabrication of pyroelectirc infrared detectors based on PMNT single crystal, including lapping and polishing of the crystal, metallization and assembly, were carried out. The pyroelectric coefficient of PMNT chip with thickness of 30 μm was measured and the results indicate that the pyroelectric coefficients of some chips are similar with the PMNT single crystal with thickness of 500 μm. Weak pyroelectric current was measured by a test system. In the end, the research emphases in the future are pointed out． Key words: infrared; pyroelectric detector; relax-based ferroelectric single crystals; uncooled 1.引言 热释电探测器是利用热释电体中自发极化随温度变化的特性而设计的，广泛应用于报警、红外成像、非接触测温、气体分析等领域，在光谱仪，激光器、红外地平仪中均有应用[1]。热释电探测器属于非制冷红外探测器，具有室温工作、结构紧凑、稳定可靠等优点。在0.8--25μm波段，热释电探测器具有平坦的光谱响应[2]。国际上很早就开展了关于热释电探测器的研究并持续至今[3-7]，目前国外研究机构和公司在非制冷红外焦平面阵列上取得了一系列的成果[8-13]。近年来，中科院上海硅酸盐研究所罗豪甦课题组率先发现弛豫铁电单晶（1-x）b(Mg1/3Nb2/3)O3- xPbTiO3（PMNT）具有综合优异的热释电性能[14]LiTaO3）和硫酸三甘肽（TGS）等常规热释电材料，介电常数适中、可调，介电损耗较低。这有利于发展高性能的热释电探测器。本