negative ions formed near the surface in RF and DC discharges负离子在射频和直流放电表面形成.pptVIP

下载本文档

2
0
约5.48千字
约 14页
2018-04-17 发布于江西
举报
版权申诉

negative ions formed near the surface in RF and DC discharges负离子在射频和直流放电表面形成.ppt

1、本文档共14页，可阅读全部内容。
2、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。
3、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
5、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
6、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
7、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
8、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

negative ions formed near the surface in RF and DC discharges负离子在射频和直流放电表面形成.ppt

Surface and volume production of negative ions in a low-pressure plasma E. Stoffels, W.W. Stoffels, V.M. Kroutilina*, H.-E. Wagner* and J. Meichsner*, Department of Physics, Eindhoven University of Technology*Institute for Physics, University of Greifswald Volume production of negative ions(example: low-pressure oxygen plasma) For O- : dissociative attachment to (excited) O2: O2 + e ? O + O- { O2(n), O2(a), O2(b) etc.} For O2- : non-dissociative attachment: O2 + e + X ? O2- + X charge transfer: O- + O2(a) ? O + O2- dissociative attachment to O3: O3 + e ? O2- + O All these processes are inefficient at low pressures! Some factsin radio-frequency plasmas in oxygen Electron/ion density measurements: Negative ion density 1016 m-3 Electron density 1015 m-3 Main ion O- Substantial O2- density: 10-20% Modelling of ion density: calculated measured (about factor 2) less molecular ions expected This is also valid for other electronegative gases Do we miss an important formation process? Extraction of negative ions in RF plasmas Ions are heavy and immobile they “feel” average potential Ions have little energy (room temperature) Positive ions are accelerated by the sheath field Negative ions are confined in the glow No negative ion extraction during normal plasma operation! Mass spectrometry of negative ions problem: extraction In DC discharges - no problem (extraction to a mass spectrometer through an orifice in the anode) In RF discharges - sheath field must be (locally) cancelled Experimental tricks: positively biased extraction orifice (*disturbs plasma) pulsed plasma detection in the afterglow (*no information about “active” discharge) However... We detect negative ions in RF without these tricks! What is the origin of these ions? Negative ions in O2 RF plasmaenergy spectra by QMS Direct negative ion fluxes recorded by mass spectrometer O- detected energy spectra obtained ions arrive at low energies (at most a few eV) potential barrier betwe