利用耦合电容法进行驱动之梳状静电致动器AComb.pdfVIP

先進工程學刊第七卷 第四期（微奈米暨生醫微機電專輯） 187 Journal of Advanced Engineering Vol. 7, No. 4, pp. 187-191 / October 2012 (Special Issue of Micro/Nano Technology and BioMEMS) 利用耦合電容法進行驅動之梳狀靜電致動器 A Comb-Drive Actuator Driven by Capacitively-Coupled-Power * 張超閔 王紹宇侯帝光 * C. M. Chang, S. Y. Wang, M. T. Hou 摘要 本論文旨在提出一個梳狀靜電致動器驅動的新方法。將傳統梳狀致動器交叉 指狀電極設計成兩邊不對稱的結構可產生此法所需之耦合電容。將電壓施加在兩 個固定電極，會在可動電極上產生耦合電壓。可動電極兩邊，電位差不同，引發 不同靜電吸引力，將產生一個合力，進而驅動可動電極。本研究分析了此致動器 的靜態位移與振動頻率。為了證明此法的可行性，一梳狀致動器被刻意設計成兩 邊具有不同初始手指重疊。此致動器以半導體製程製作，並接受測試。實驗結果 顯示，此新式致動方式是可行的。使用此致動方式的好處是無需對可動電極做任 何電氣連接，有利梳狀致動器採用柔軟但不導電的材料當作彈簧。 關鍵詞 ：驅動機制，電容耦合，靜電致動器 Abstract In this paper, a new actuation mechanism to drive comb-drive actuators is discussed. As different finger overlap on each side of comb-drive actuators is designed to generate capacitive coupling for the actuation mechanism, voltage is then induced at the rotor due to the capacitive coupling when driving voltages are applied on the stators. Because of the voltage differences between the stators and the rotor, an electrostatic force would be exerted onto the rotor. This paper analyzes the actuator’s static displacement and resonant frequency. In this way, a comb-drive actuator with different initial finger overlaps is fabricated and tested to verify the design. The results show th