层状表面声波滤波器之分析与制造Ⅲ.PDF

行政院國家科學委員會專題研究計畫期末報告 層狀表面聲波濾波器之分析與製造(Ⅲ) Analysis and Fabrication of Layered Surface-Acoustic-Wave Filter (Ⅲ) 計畫編號：NSC 92-2212-E-002-001 執行期間： 年 月 日至 年 月 日 92 8 1 93 7 31 主持人：吳政忠 台灣大學應用力學研究所 一、中文摘要 decreasing the electrode spacing into the sub-micron region. This three-year project is 表面聲波元件(Surface Acoustic Wave to study the analysis and fabrication of Device, SAW device) 具有高性能、尺寸 layered SAW filters by both the theoretical 小、低成本，且與 IC 製程技術相容等優 and experimental approaches. In the first 點，使其在電子工業與通訊系統上佔有很 phase, an IF SAW filter was designed and 重要的地位。隨著行動通訊的日新月異及 fabricated. The coupling-of-modes (COM) 對於高資料傳輸速度的要求，傳統結構的 mode was established to calculate its 表面聲波元件因受限於電極線寬與基底材 frequency response. Besides, we adopted the inversion algorithm to determine the 料，已不敷使用，而層狀表面聲波元件能 practical COM parameters. In the second 利用不同結構的搭配來提供多重的優點， phase, dispersion relation and frequency 以應付日益嚴苛的要求，因此本計畫以三 response of a layered SAW device were 年時間研製先進層狀表面聲波濾波器，並 analyzed and discussed based on effective 建立相關的設計、製程與量測技術。研究 permittivity. In addition, a method for 範疇包括壓電層狀介質波傳特性分析、建 measuring the properties of thin film in the 立聲波耦合模態理論、表面聲波元件參數 sub-micron range has been developed based on the SAW sensor responses. Finally, a 量測、中頻表面聲波振盪器與先進層狀表 ZnO/sap