FinFET(鳍式场效晶体管)工艺技术IntroductiontoFinFETtechnology.docVIP

This is the first of a multi-part series, to introduce FinFET technology to SemiWiki readers. These articles will highlight the technologys key characteristics, and describe some of the advantages, disadvantages, and challenges associated with this transition. Topics in this series will include FinFET fabrication, modeling, and the resulting impact upon existing EDA tools and flows. (And, of course, feedback from SemiWiki readers will certainly help influence subsequent topics, as well.) Scaling of planar FETs has continued to provide performance, power, and circuit density improvements, up