新型波长可调谐激光器的研究-光通信技术专业论文.docxVIP

摘婴摘要随着磷化铟材料外延技术的进步，高可靠性的半导体有源器件已走向成熟， 被广泛应用于各个领域。而信息网络的高速发展．对光通信器件提出越来越多的 要求。基于磷化铟的可集成的波长可调谐激光器的正是满足这一需求的关键器件， 值得深入研究。本课题的研究目的就是提供制作更简单、自由光谱范围更大、性能更稳定的 波长可调谐激光器。本文提出了空气槽分束激光器结构。通过附加两根波导构成FP振腔进行选 模滤波，取代了环型谐振腔，从而省略深刻蚀槽结构，提高激光器的注入效率。 利用空气槽对光的反射和透射作用，取代了3dB多模干涉耦合器，减小器件的尺 寸。本文的另一个研究重点是解理面V型腔激光器。利用解理面作为反射面，相 较深刻蚀槽作为反射面，结构简单且制造方便，但增加了弯曲波导的约束条件。 为满足两个谐振腔末端对齐，利用多项式波导的高阶项进行匹配，得到弯曲损耗 最小的波导形状。然后分析半波耦合器的特性，给出新型耦合器的设计，从而减 弱解理面位置偏移设计值对耦合系数的影响、最后，本文介绍了解理面V型腔激光器的制作。基于现有实验平台的经验， 总结磷化铟基激光器的制作工艺，为相关集成光电子器件的制作提供可参考。关键词：波长可调谐激光器；空气槽分束；V型耦合腔；游标效应AbstractAbstractWith the advancement of the planar epitaxy technique for Indium phosphide(InP)，highly-reliable active semiconductor devices have been widely adopted in a variety of fields．However,the blossoming development of communication network is imposing more requirements on optic communication devices．To fuIfill theserequirements，we choose the integrable and wavelength tunable InP laser as thecandidate for comprehensive investigation．In this article，we propose a kind of laser structure based on beam—splitting by air—gap．Useing two extra waveguides as the Fabry Perot cavity for mode selection takes the place of the ring-shaped cavity．As a result，the structure deep etched trench is left out and the injection efficiency gets boosted．In addition，the novel laser structure takes the place of the 3dB multimode interferometer(MMI)coupler and reduces the size of device by taking advantage of the reflection and transmission properties of the air-gap．The other focus of this article is the investigation of cleavage plane based V-shaped cavity laser．Using cleavage plane instead of deep etched trench as the reflection plane brings down the cost and complexity of manufacturing．But on the other hand，the cleavage plane imparts more constrains for bending waveguides．To solve this problem，we figure out the waveguide shape with mjnimum bending loss by matching the high order terms of the waveguide polynomial to meet the requirement that both ends of the caviti