铁磁金属铁磁三明治多层膜的应力阻抗效应研究-材料科学与工程专业论文.docxVIP

摘要本文还采用光刻和剥离工艺在 Kapton 基片上制备了大小为 3mm×4mm 的FeCoSiB/Cu/FeCoSiB 多层膜应变片，测试结果表明，当应变片的应变从 990ppm 增加到 2700ppm 时，其阻抗从 118.7Ω 增加至 140.3Ω，相对阻抗变化达到 18.2%， 应变灵敏系数大于 100，且在 990ppm-2700ppm 应变范围内，阻抗随应变的变化具 有很好的线性特性。关键词：非晶态铁磁薄膜，三明治多层膜，应力阻抗效应，应力/应变传感器，FeCoSiB/Cu/FeCoSiBABSTRACTABSTRACTThe amorphous magnetic alloy films exhibit obvious stress-impedance effect when external stress is applied on the ferromagnetic material, the impedances of the ferromagnetic materials change remarkably. This characteristic of amorphous alloy is very significant to the development of strain or stress sensor. So it’s important to study the stress-impedance effect of amorphous alloy. Since the ferromagnetic/metal/ferromagnetic sandwiched films have a more remarkable stress-impedance effect than that of single layer ferromagnetic films, the stress-impedance effect of ferromagnetic/metal/ ferromagnetic sandwiched films have been studied both in theory and experiment in this thesis.The physic model of ferromagnetic/metal/ferromagnetic sandwiched film has been established firstly. By solving the Maxwell equation we get the relationship between the impedance and the permeability. Later we solve the Landau-Lifshitz-Gilbert equation to get the relationship between the permeability and applied stress. At last we use the permeability of ferromagnetic materials to link the applied stress and the impedance, which gives the formula of stress impedance effect. Based on the model, the influences of geometric and physic parameters on the impedance and stress impedance effect have been studied. The results show that the stress-impedance effect increases with the increase of the thickness of the ferromagnetic layer and metal layer. The stress-impedance effect can be improved by using metal layer with high conductivity and magnetic layer with high saturation magnetization. As the frequency increases, the stress-impedance effect increases firstly and decreases later. There is a best frequency range does exist, and around