基于数字全息显微术的三维表面形貌测量技术分析-analysis of 3d surface topography measurement technology based on digital holographic microscopy.docxVIP

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2018-05-20 发布于上海
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基于数字全息显微术的三维表面形貌测量技术分析-analysis of 3d surface topography measurement technology based on digital holographic microscopy.docx

基于数字全息显微术的三维表面形貌测量技术分析-analysis of 3d surface topography measurement technology based on digital holographic microscopy

AbstractAlongwiththedevelopmentofmachineryindustry,semiconductorindustryandbiotechnology,ultra-precisionprocessing,nano-technology,micro-electromechanicalsystemsandliving-cellsengineeringareputtingforwardhigherrequeststothethree-dimensionalmeasurementofmicro-nanosurfacetomography.Preciseinstrumentsofthree-dimensionalsurfacetomographymusthavethecharacteristicsofreal-timedynamicobservation,highverticalandlateralresolutionsandwidemeasurementrange.Digitalholographyisanimagingandmeasuringtechnologybasedontheprincipleofdiffractionandinterferenceprincipleoflight,whichcangetthewaves’amplitudeandphasei

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基于数字全息显微术的三维表面形貌测量技术分析-analysis of 3d surface topography measurement technology based on digital holographic microscopy.docxVIP