物理气相沉积_Ti_Al_N涂层刀具的切削性能.pdfVIP

~试验研究~ 物理气相沉积(Ti, Al)N涂层刀具的切削性能 祝新发，陈顺民，许辉 （上海工具厂有限公司，上海 200093） 摘　要：涂层已成为提高刀具切削性能的重要手段。对上海工具厂镀膜机制备的(Ti, Al) N涂层性能分析 发现，其表面硬度达到32GPa，高于TiN的24GPa；同时，涂层表面生长良好。在试验室进行的 干式切削试验表明，(Ti, Al) N涂层切削过程中磨损小于TiN涂层，切削寿命高于TiN涂层；(Ti, Al) N 涂层适合高速切削，分析了(Ti, Al) N涂层适合高速切削的主要原因。 关键词：物理气相沉积；涂层；切削性能；高速切削 中图分类号：TG174.444　　文献标识码：A　　文章编号： PVD (Ti,Al) N Coating and Its Tooling Quality ZHU Xin-fa, CHEN Shun-min, XU Hui (Shanghai Tool Works Co., Ltd., Shanghai 200093) Abstract: The coating has become an important way to improve on the tooling quality of tool. The property of the (Ti, Al) N coating made by the coating machine of Shanghai Tool Works was analyzed. It was revealed that the surface hardness of the (Ti, Al) N coating is as high as 32GPa, but that of the TiN coating is only as high as 24GPa. At the same time the growth of the (Ti, Al) N coating is in a good state. The dry cutting testing shows that wear loss of the (Ti, Al) N coating during the cutting will be less than that of the TiN coating , and its cutting life is longer compared with the TiN coating. The (Ti,Al) N coating is fit for high speed cutting. The main reasons why the (Ti, Al) N coating is applicable for high speed cutting were analyzed as well. Key Words: PVD; coating; tooling quality; high speed cutting 1　前言 2　试验过程 TiN硬质涂层自上世纪70年代在刀具上得到成 (Ti, Al)N涂层采用上海工具厂离子镀膜机制 功应用，有力地推动了机械加工自动化规模的进 备，用于微结构和力学性能表征的高速钢试样和用 程。然而，目前高速切削、干式切削等新技术对刀 于切削性能研究的8mm硬质合金钻头，经精磨、 具涂层提出了更高的要求，希望刀具涂层在TiN涂层 喷砂和在碱液中超声波清洗后，装在真空室内可自 原有较高硬度(约24GPa)、低摩擦系数(约0.5)等优良 转和公转的工件架上。提供沉积材料的Ti-Al合金靶 -4 综合性能的基础上，进一步提高硬度和高温抗氧化 由直流动态磁控阴极控制。真空室经抽真空到10Pa 性能，以适应高速切削、干式切削时刀具涂层所经 后，将试样加热到450℃，并通入Ar气进行离子轰 受的苛刻工况。在TiN涂层基础上加入其它元素进行