电感耦合增强的单、双频容性耦合等离子体特性的分析-analysis of single and double frequency capacitively coupled plasma characteristics with enhanced inductive coupling.docxVIP

3.1电感耦合增强的容性耦合等离子体放电系统.................................................253.1.1真空室.....................................................................................................253.1.2抽气系统.................................................................................................263.1.3电控系统.................................................................................................263.1.4气路系统.................................................................................................263.1.5水冷却和水压报警系统..........................................................................263