VEECO Mark II+ 离子源技术资料.pdfVIP

Mark II+ Ion Source Exclusive distributor: Sunnet Systems Inc. Cell: +86 1 Contact: Carl Jin Mark II+ Ion Source - Overview Ion Source Improvements Faster Maintenance Greater Performance Smaller Form Factor Configurations Radiation cooled (900W), Filament Cathode Water cooled (1500W), Filament Cathode Water cooled (3000W), Hollow Cathode Anode Assembly Sold Separately (for each) New Feedthrough, Vacuum Leads Power Cable Improved Design for greater reliability ©2006 Veeco Instruments Inc. Mark II+ - Improved End-Hall Source Features of the Mark II+ • Removable, indirectly-cooled anode Anode sub-assembly with thermal transfer to Assembly (all consumables) water-cooled partition plate[2] • Common components for radiation- and water-cooled options • Serviceable anode and front plate components are easily removed and quickly replaced without disrupting water, gas or electrical services Electric Water • Lower temperature and wear rates Gas of consumable gas distribution plate [2] Patent Pending: D. Burtner, et. al., “Fluid Cooled Ion Source”, US Patent Application No. 20050248284, Nov. 11, 2005. Mark II+: Filament Cathode, Water-Cooled ©2006 Veeco Instruments Inc. Mark II+ Maintenance Improvements Double click image to start video ©2006 Veeco Instruments Inc. Mark II+ - Ion Beam Current Density Profiles Argon beam current densities of the Mark II+ are relatively higher and are more broadly distributed when compared to the earlier Mark II. Beam Current measured in ox