pbzr02ti08o3与pbzr08ti02o3及其复合膜电热效应研究-study on electric heating effect of pbzr 02 ti 08 o 3, pbzr 08 ti 02 o 3 and their composite films.docx

Classified Index: TQ174.75 U.D.C: 666.3Dissertation for the Master Degree in EngineeringELECTROCALORIC EFFECT OF Pb(Zr0.2Ti0.8)O3 AND Pb(Zr0.8Ti0.2)O3 AND THEIR COMPOSITETHIN FILMSCandidate：Wang LiSupervisor：Prof. Wang FupingAcademic Degree Applied for：Master of EngineeringSpeciality：Chemical Engineering and TechnologyAffiliation：School of Chemical Engineering andTechnologyDate of Defence：June, 2011Degree-Conferring-Institution：Harbin Institute of Technology摘 要铁电电介质材料，在绝热条件下 去极化时产生致冷效应，即电热效应 (ECE)，利用电热效应研制的铁电致冷器结构简单，体积小巧，便于操作，使 用方便，不造成环境污染，锆钛酸铅(PZT)基铁电薄膜在较低的场强下，可以获 得巨电热效应，在电子航天军事等方面具有广阔的应用前景。本文针对 100℃--200℃的致冷温区，采用溶胶-凝胶法结合快速热处理工艺 (RTA)在铂基底上分别制备 Pb0.7Sr0.3(Zr0.2Ti0.8)O3、Pb0.75Sr0.25(Zr0.8Ti0.2)O3 单一组 分薄膜及 Pb0.7Sr0.3(Zr0.2Ti0.8)O3/Pb0.75Sr0.25(Zr0.8Ti0.2)O3 两种组份复合薄膜 (简称 PSZT)。X 射线衍射 (XRD)分析结果表明，450℃预烧，650℃下 RTA 工艺制备 的单一组份 Pb0.7Sr0.3(Zr0.2Ti0.8)O3 和 Pb0.75Sr0.25(Zr0.8Ti0.2)O3 薄膜均为单一钙钛矿结构的多晶薄膜，分别采用一步和二步快速热处理工艺对复合薄膜进行热处理， 均能得到单一钙钛矿结构的薄膜，二步退火相比于一步退火得到的薄膜衍射峰 强度明显增强。SEM 分析结果表明，晶粒均匀，薄膜致密，与衬底结合紧密。分别对三种 PSZT 薄膜铁电介电性能进行测试评价。PSZT 薄膜的电滞回线均呈现铁电体特征，铁电性良好。施加相同的外电场，复合薄膜剩余极化值最 大，矫顽场最低。通过控制锆钛比和锶的掺入量，有效调节了 PSZT 薄膜居里 温度至所需范围。对于三种薄膜介电温谱的测试，Pb0.7Sr0.3(Zr0.2Ti0.8)O3 薄膜表 现出典型的铁电体介电温谱特征，相变发生于一个温度点，呈现尖锐的峰， Pb0.75Sr0.25(Zr0.8Ti0.2)O3 与复合薄膜介电温谱不显示尖锐的峰，而呈现出相当宽 的平缓的峰，表明薄膜呈现弥散相变，具有弛豫性。分别对三种 PSZT 薄膜电热效应进行测试评价。热力学公式计算铁电薄膜 电热温变值，三种薄膜在各自的居里点附近均出现了最大电热温变值。复合薄 膜具有较宽的有效电热温区。关键词：PSZT 薄膜；复合薄膜；铁电介电性能；电热效应AbstractFerroelectric dielectric materials generate refrigeration through depolarization under the adiabatic condition, namely electric effect (ECE). We take advantage of the electrocaloric effect (ECE) to develop refrigerating equipment. This equipment possesses many advantages, for example: a simple structure and small volume, simple operation and friendly to environment. The giant ECE was reported in the PZT-based thin film under a lower electric field. It has a promising future in the term of space flight and military affairs.In this paper, for 100℃-200℃ refrigeration range, the one-component thi