Threshold ionization mass spectroscopy of radicals in RF fki阈上电离质谱中的自由基射频KFKI.pptVIP

Threshold ionization mass spectroscopy ofradicals in RF silane discharge Peter Horvath 5/19/2004 * Progress of experiments Overview Experiment is fully assembled Electronics and computer control work Electron gun seems to work Mass spectrometer works (most of the time ?) RF generator can operate discharge both in argon and silane Film growth rate measurement setup is built by Alan, experiment is ready to start Discharge and mass spectrometer do not work together ? (yet) Schematics of TIMS apparatus Mass spectrometer and ionizer Mass spectrometer assembly Ionizer assembly Electronics and computer control Mass spectrometer unit and step-up transformer head Electronics and computer control Laser PD RF Gen Ion deflectors Magnets Cathode Anode F-Cup Ion lenses Quadrupole Channeltron 45 V amplifier Mass spec. Control unit Electrometer Rect. Pressure Labview Problems with the electron gun The current arriving to the Faraday cup is very small, Only 1% of the total emission Possible reasons: misalignment (--) magnetized SS (?) weak B field (+) inhom. E field (?) The total emission is well below space charge limit. reflecting anode (+) Limited cathode lifetime contamination operating temp. too high Magnet Screen F-Cup Cathode Anode Magnet 7V offset in the emission vs. voltage curve the anode may be covered by an insulating layer Improvements on electron gun moly anode and screen bigger hole on anode double magnets F-cup is painted black anode is painted black plate in front of the cathode Improvements on Electron gun: system is baked lower cathode temp Performance of electron gun Typical operating conditions: cathode voltage: -10 V anode-cathode voltage: 2.4 V emission current: 4.4 uA anode current: 0.9 uA screen current: 2.5 uA F-cup current: 1.0 uA Mass spectrometer: mass spectrum Mass spec. works: good resolution reliable mass setting (no drift) huge dynamic range: 1pA - 1uA wor