不同支撑载体对gan基led薄膜应力及发光性能影响-effect of different support carriers on stress and luminescent properties of gan - based led thin films.docxVIP

ABSTRACTGaN -based LED has been widely used in the lighting field and closely linked with peoples lives， but the improvement of the existing production process， the development of new technologies， the related physical mechanism research is the hot spot in the whole field. At present， the commercialization of GaN based LED Epitaxial substrate is divided to three technical routes which are silicon carbide (SiC)， sapphire (Al203) and silicon (Si) substrate..Although silicon substrate GaN- based LED took the lead to realize the industrial production in China， and became one of three main semicond