(英文)无掩膜光刻的模式生成系统.docVIP

------------------------------------------------------------------------------------------------ —————————————————————————————————————— (英文)无掩膜光刻的模式生成系统 ICCAS2005 June 2-5, KINTEX, Gyeonggi-Do, Korea Region-based Pattern Generating System for Maskless Photolithography Younghun Jin*, Kiwon Park*, Jaeman Choi*, Sangjin Kim**, Changgeun An**, and Manseung Seo* * Dept. of Computer-Aided Mechanical Design Eng., Tongmyong Univ. of I.T., Busan, Korea (Tel : +82-51-610-8351; E-mail: sms@tit.ac.kr) **Thinfilm Technology Group, LG PRC, LG E