现有激光跟踪仪评定方法Methodforhowto-IndicoIHEP.PPTVIP

The light path of vertical axis and horizontal axis move together竖轴光路与水平轴光路联动 Scheme 2方案2 Scheme 3方案3 Horizontal axis and vertical axis both adopt single-light-path interferometry, 横轴与竖轴均采用单光路干涉测量。 Independent vertical axis and horizontal axis.Horizontal axis adopt marble guide rail,air floating workbench. Vertical linear guide rail is mechanical axis，which is ball screw driven. . 水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。 horizontal axis measurable range(横轴可测范围):80m, Measurement Uncertainty（测量不确定度）:1+0.5L mm Verticle axis measurable range（竖轴可测范围）:2m , Measurement Uncertainty（测量不确定度）:1+0