微细电火花机床蠕动式主轴装置的分析-analysis of peristaltic spindle device of micro edm machine tool.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract Micro-EDM has unique advantages in machining micro array holes because of no macro forces in processing, non-contact discharge between the tool and workpiece and micro single discharge energy. But in general it should take a long time to fabricate the micro electrode tool on line which is used in micro-EDM, in addition, the electrode tool wear in processing, especially in micro-EDM milling. These two drawbacks greatly affect the processing efficiency and accuracy in machining micro array holes. Therefore, the development of the high turning speed and precision spindle which can directly clamp commercially available micro electrode wire of different diameters and automatically compensate the tool wear is of great significance in reducing micro electrode tool preparation time and improving the processing efficiency of the microstructure. The advantages and disadvantages of domestic and international micro-EDM spindle device have been analyzed on perspectives of the range of electrode wire diameter that can be clamped, rotational accuracy, response frequency and the automatic compensation of the tool wear. Then a program of peristaltic spindle that combined with the precision 2D aligning device has been proposed. In this program the micro electrode tool is clamped by a micro V-groove structure, the coaxial accuracy of the electrode wire and spindle is adjusted through the 2D aligning device and the clamping, releaseing and feeding of the electrode wire is conducted by the voice coil motor. For the clamping of electrode wire is among 100~300μm, the micro V-groove is designed after the analysis on influence of the dimension of micro V-groove to the locating of different diameter electrode wire. Several programs of processing micro V- groove have been analyzed and compared to solve the problem of small size and high machining accuracy. The micro V-groove clamping mechanism has been designed with theoretical and finite elem