硅压阻式压力传感器温度误差补偿系统研究.docVIP

中北大学信息商务学院2011届毕业设计说明书 PAGE 摘要 压阻式压力传感器是利用半导体材料硅的压阻效应制成的传感器,具有灵敏度高,动态响应快,测量精度高,稳定性好,工作温度范围宽,易于小型与微型化,便于批量生产与使用方便等特点。因此,它是一种发展迅速,应用广泛的新型传感器。压阻式压力传感器的一个主要问题是温度补偿问题,由于温度会对传感器的灵敏度及测量精度产生很大的影响,在相当程度上限制了压阻式压力传感器的使用,对传感器进行温度补偿显的尤为重要。 论文中介绍了国内外研究现状,课题的背景及意义,同时介绍了现代信号调理技术的发展。 应用信号调理芯片是现代常用的一种补偿方法。本论文应用智能化的模拟一数字混合信号调理技术,采用MAX1457,开发出了一整套温度补偿系统,经调理后的传感器综合误差不超过0.1%。MAX1457是一种专用传感器信号调理芯片。此芯片集成化程度较高,可以补偿硅压阻式压力传感器的温度误差和非线性误差。论文首先介绍了MAX1457芯片的结构、分析了芯片的设计思路,在结合压力传感器自身特点的基础上,深入分析了补偿思想,分析了能够实现高精度补偿的原因,设计了补偿模块以及的硬件电路及软件的核心代码。 【关键词】 压阻式传感器 温度补偿 信号调理 MAX1457 Abstract Piezoresistive pressure sensor, be made of semiconductor silicon based on piezoresistive phenomenon, has many characteristics of high sensitivity, quick response, high measurement precision, good stability, wide working temperature range and being miniaturized and produced easily. It is a new type sensor developed quickly and used widely. Piezoresistive pressure sensor always faces an important problem of temperature compensation which restricts its applications because of temperature influence on sensor’s sensitivity and measurement precision. Therefore, it is a significant project to research temperature compensation for piezoresistive pressure sensor.First of all, state of arts on this topic is reviewed. Some compensation methods are analyzed and their principles are then summarized. The technology about modern signal conditioning which will be used in this paper is also introduced.Signal conditioning chip is in common used for compensation in recent years. Inour research, a set of silicon piezoresistive sensor temperature compensating system based on MAX 1457 is proposed. The total error is limited to 0.1 %FS after being calibrated. MAX1457 is a special sensor signal conditioning chip with high integration. It is mainly used to compensate temperature shift and non-linearity error of piezoresistive pressure sensor. In this paper, the structure of MAX1457 is introduced and relevant math formula is deduced firstly. Then,