11管道材料介绍-(精选·课件).pptVIP

UHP Gas Delivery System Materials Agenda Part 1 Tubing / Piping Fitting Part 2 Valve Regulator Part 3 Filter Gauge Other Tubing / Piping Polymer - nylon, plastics, PFA/PVDF Permeability and outgassing characteristics Metals Copper, SS304, SS316, SS316L VIM/VAR, Hastelloy Tubing / Piping－Metal Tubing / Piping－Metal Tubing / Piping - Treatment 2 types: 1. Polish: Chemical Polish (Acid) Mechanically Polish (MP) Electro Polish (EP) 2. Passivation: Fluorine Passivation (5% F2/N2) Tubing / Piping Ra= Roughness Absolute Maximum Average