Metal腐蚀工艺介绍课件.ppt

* For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * For metal etch * * * For metal etch * For metal etch * For metal etch * For metal etch 版1 center 版2 center 版3 center edge edge edge Metal腐蚀常见异常： Metal腐蚀常见异常： AL过腐蚀： 1、AL腐蚀overetch量太大； 2、通孔腐蚀后单根AL条上剩余介质太薄 可能造成原因： Metal腐蚀常见异